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![C05300 - SEMI C53 - Specifications for Dimethyl Sulfoxide (DMSO) [Grades 1 and 2] StdDcs-Current org in June 2009](https://cdn.shopify.com/s/files/1/0567/3402/3747/files/CVolume_pc_ad9b5096-3e66-4115-a5c9-c42f5ebbf4a6.png?v=1776703083)
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org in June 2009
Each method provides a measure of the amount of material that is removed from a substrate during a controlled chemical reaction sequence
These dimensions apply to pellicle for masks that are principally used in fabricating flat panel displays
The scope of this Specification is all grades of methanol used in the semiconductor industry
Due to the migration to large substrate sizes in FPD production
C05300 - SEMI C53 - Specifications for Dimethyl Sulfoxide (DMSO) [Grades 1 and 2] StdDcs-Current org in June 2009NOTICE: This Document was reapproved with minor editorial changes. The purpose of this Document is to standardize requirements for dimethyl sulfoxide used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Referenced SEMI Standards SEMI C1 Guide for the Analysis of Liquid Chemicals
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