E12500 - SEMI E125 - EQUIPMENT SELF DESCRIPTION 사양 Revision:SEMI E125-0414 - Superseded • Description of the specification

• Description of the specification conventions used

different levels of purity have been established as standards and guidelines for each liquid chemical

1 — Specification for Cluster Tool Module Interface 300 mm: Mechanical Interface and Wafer Transport

Examples of the other films except polarizing films are retardation films

SEMI E82-1106 (Reapproved 0523)

E12500 - SEMI E125 - EQUIPMENT SELF DESCRIPTION 사양 Revision:SEMI E125-0414 - Superseded • Description of the specificationThis Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 23, 2013. Available at www. semiviews. org and www. semi. org in April 2014; originally published July 2003; previously published July 2010. This Specification describes a method for allowing equipment suppliers to provide a description of the variables,