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5 The values stated in SI units are to be regarded as the standard
SEMI G10-96 (technical revision)
and verification at the commercial sales/purchase interface
Available at www
It is not intended for dark-field illumination
E06200 - SEMI E62 - 300 mmフロントオープニング・メカニカルインタフェース（FIMS）の仕様 Revision:SEMI E62-1106 - Superseded 5 The values stated inglobal Physical Interfaces & Carriers Technical Committee20111224global Audits and Reviews Subcommittee20125www. semiviews. org www. semi. org1997200611 : Referenced SEMI Standards SEMI E1. 9 Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers SEMI E15 Specification for Tool Load Port SEMI E19 Standard Mechanical Interface (SMIF) SEMI E47. 1 Mechanical Specification for Boxes and Pods Used to Transport and Store 300mm
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