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SEMI G42 — Specification for Thermal Test Board Standardization for Measuring Junction-to-Ambient Thermal Resistance of Semiconductor Packages
for which Instrumental Neutron Activation Analysis (INAA) is one method of choice
SEMI P37 — Specification for Extreme Ultraviolet Lithography Mask Substrates
SEMI M45 — Specification for 300 mm Wafer Shipping System
Flow Curve
E14700 - SEMI E147 - Guide for Equipment Data Acquisition (EDA) Revision:SEMI E147-0307E - Inactive SEMI G42 — Specification forThis standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007. E This standard was editorially modified in September 2007 to remove duplicate sections. Changes were made to 6. This guide document provides additional information about the Equipment Data Acquisition (EDA)
