C05300 - SEMI C53 - ジメチルスルホキシド（DMSO）[グレード1および2]の仕様 Revision:SEMI C53-0704 (Reapproved 0312) - Inactive if not all

if not all

org September 1998

本スタンダードは，Gases Global Technical Committeeで技術的に承認されている。現版は2011年9月12日，global Audits and Reviews Subcommitteeにて発行が承認された。2011年11月にwww

- There is not a fixed minimum diameter for nominal 300 mm wafers

which is used in the semiconductor industry for the deposition of aluminium metal by vapor deposition techniques and aluminium oxide based layers by atomic layer deposition

C05300 - SEMI C53 - ジメチルスルホキシド（DMSO）[グレード1および2]の仕様 Revision:SEMI C53-0704 (Reapproved 0312) - Inactive if not allNotice: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI DMSO Referenced SEMI Standards SEMI C1 Guide for the Analysis of Liquid Chemicals