C00331 - SEMI C3.31 - Specification for Dichlorosilane (SiH2Cl2) in Cylinders, 99% Quality (Provisional) Revision:SEMI C3.31-1102 - Replaced It is the responsibility of

It is the responsibility of the users of the Documents to establish appropriate safety and health practices

3  This Guide is complementary to existing SEMI Test Methods for measuring these parameters on single wafers

本標準經由全球平面顯示器色彩委員會之技術認可。此版本是在

SEMI D3 — Quality Area of FPD Substrates

6-0421 (technical revision)

C00331 - SEMI C3.31 - Specification for Dichlorosilane (SiH2Cl2) in Cylinders, 99% Quality (Provisional) Revision:SEMI C3.31-1102 - Replaced It is the responsibility ofNOTICE: This document was replaced by SEMI C56 in 2005. This specification was technically approved by the Global Gases Committee and is the direct responsibility of the North American Gases Committee. Current edition approved by the North American Regional Standards Committee on August 29, 2002. Initially available at www. semi. org September 2002; to be published November 2002. Originally published in 1986; previously published in 1994. The purpose