E13600 - SEMI E136 - Test Method for Determining the Output Power of RF Generators Used in Semiconductor Processing Equipment RF Power Delivery Systems StdPbc-1020 SEMI C35-0118 (technical revision)

SEMI C35-0118 (technical revision)

• Carrier scheduling

• Creep/Lockup

Some terms are specialized to IC wafer and device production

SEMI E40— Standard for Processing Management

E13600 - SEMI E136 - Test Method for Determining the Output Power of RF Generators Used in Semiconductor Processing Equipment RF Power Delivery Systems StdPbc-1020 SEMI C35-0118 (technical revision)NOTICE: This Standard was completely rewritten in 2021. The purpose of this Test Method is to provide an accurate method for measuring the output power of radio frequency (RF) generators used in RF power delivery systems of semiconductor processing equipment. This Test Method is referred to as a preferred method of RF power measurement for conforming to SEMI E113. This Test Method specifies the testing procedures and test equipment required for