F06200 - SEMI F62 - Test Method for Determining Mass Flow Controller Performance Characteristics for Ambient and Gas Temperature Effects StdPbc-0619 1 This Specification defines metrics

1  This Specification defines metrics and calculations for reporting equipment data quality

This Test Method covers a procedure for measuring particle removal characteristic of equipment fan filter unit (EFFU) installed inside equipment

Only mixed virgin HPIX resin is used for the testing within this Guide

Charged wafer and reticle surfaces attract airborne particles (electrostatic attraction [ESA]) and increase the defect rate

Equipment Communication Standards1 Messages Transfer (SECS-I) or the protocol defined in SEMI E37

F06200 - SEMI F62 - Test Method for Determining Mass Flow Controller Performance Characteristics for Ambient and Gas Temperature Effects StdPbc-0619 1 This Specification defines metricsThis Standard defines a method for testing mass flow controllers (MFCs) being considered for installation into a gas distribution system and to quantify ambient and gas temperature effects on the MFCs indicated and actual flow. This Test Method applies to metal and polymer sealed MFCs. The tests include those listed below and are to be performed in the following order: 1. Ambient Temperature Effects (Steady State and Transient) 2. Gas Temperature