C00326 - SEMI C3.26 - Specification for Tungsten Hexafluoride (WF6) in Cylinders, 99.8% Quality StdTpc-Process Chemicals - Miscellaneous org in June 2008

org in June 2008

The method of membrane treatment prior to the test for decreasing the adsorbing effect

originally published March 2001

Please make sure that you have reviewed your order prior to finalizing your purchase

originally published in 1983

C00326 - SEMI C3.26 - Specification for Tungsten Hexafluoride (WF6) in Cylinders, 99.8% Quality StdTpc-Process Chemicals - Miscellaneous org in June 2008NOTICE: This Document was balloted and approved for withdrawal in 2011. It was replaced by SEMI C70. Tungsten hexafluoride is a colorless gas or colorless liquid. It is shipped as a liquefied gas under its own vapor pressure. Referenced SEMI Standards (purchase separately) None. Revision History SEMI C3. 26 0301 (Withdrawn 0312, replaced by SEMI C70) SEMI C3. 26 0301 (technical revision) SEMI C3. 26 94 (technical revision) SEMI C3. 26 93 (technical