M06300 - SEMI M63 - 化合物半導体エピタキシャルウェーハに使用するサファイア基板の仕様 Revision:SEMI M63-0306 - Superseded SEMI F49-0200 (Reapproved 1108)

Name: M06300 - SEMI M63 - 化合物半導体エピタキシャルウェーハに使用するサファイア基板の仕様 Revision:SEMI M63-0306 - Superseded SEMI F49-0200 (Reapproved 1108)
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SKU: 91955077375
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SKU: 91955077375

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Description

SEMI F49-0200 (Reapproved 1108)

• Phosphine (PH3)

The purpose of the Object Services Standard (OSS) is to provide general terminology

3-0298 (technical revision)

SEMI E5-0308 (technical revision)

M06300 - SEMI M63 - 化合物半導体エピタキシャルウェーハに使用するサファイア基板の仕様 Revision:SEMI M63-0306 - Superseded SEMI F49-0200 (Reapproved 1108)global Compound Semiconductor Materials Committee2006116global Audits and Reviews Subcommittee20062www. semi. org20063CD ROM E20068R2 2 Referenced SEMI Standards None.

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