E12900 - SEMI E129 - Guide to Assess and Control Electrostatic Charge in a Semiconductor Manufacturing Facility StdPbc-1225 SEMI E64 — Specification for

SEMI E64 — Specification for 300 mm Cart to SEMI E15

This Specification defines a method for organizing and preprocessing factory data to support the detection and reduction of product time waste for a product unit during its time in the factory

SEMI D39-0704 (Reapproved 0710)

a methodology by which semiconductor processing equipment is installed in a cost-effective and timely manner

and mechanical properties of FPD substrates

E12900 - SEMI E129 - Guide to Assess and Control Electrostatic Charge in a Semiconductor Manufacturing Facility StdPbc-1225 SEMI E64 — Specification forThe purpose of this Guide is to minimize the negative impact on productivity caused by static charge and electric fields in semiconductor manufacturing environments. It is a guide for establishing electrostatic compatibility in facilities used for semiconductor manufacturing. Electrostatic compatibility of production equipment is addressed in SEMI E78. Electrostatic surface charge causes a number of undesirable effects in semiconductor manufacturing