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SEMI S13 — Environmental
The use of AFM for measuring the roughness of polymer surfaces is outlined in this test method
previously published March 2010
SEMI M31 — Mechanical Specification for Front-Opening Shipping Box Used to Transport and Ship 300 mm Wafers
41 — Standard for Oxygen (O2)
E12100 - SEMI E121 - Guide for Style and Usage of XML for Semiconductor Manufacturing Applications Revision:SEMI E121-0304 - Superseded SEMI S13 — EnvironmentalThe inclusion of eXtensible Markup Language (XML) notation within current SEMI Standards reflects the industrys growing interest in XML technology. This Guide is the first step to prepare for XML protocols in SEMI Standards and to establish consistency in XML style and usage. Recommendations given in this Document are intended for the definition and conformance of XML based standards. This Document also attempts to highlight those areas where
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