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data item variables
such as epitaxial layers
The present Document defines a noncontact
Grade A1 represents those materials which are of high resistivity and stable following growth
この仕様は半導体製造に使用される高純度ガス配管系および部品の，漏れ試験の要求条件と漏れ率を定義する。また，装置，材料，サービスの調達および設置に役立つことも目的としている。
F01500 - SEMI F15 - Test Method for Enclosures Using Sulfur Hexafluoride Tracer Gas and Gas Chromatography StdPbc-0925 data item variablesDO NOT DOWNLOAD, THE TECHNICAL CONTENT OF THIS STANDARD HAS BEEN MOVED TO SEMI S6. The purpose of this Document is to provide a permanent withdrawal notice for SEMI F15 indicating that the technical content has been superseded by Appendix 2, Test Method for Determining Fugitive Emissions by Using Tracer Gas of SEMI S6. Referenced SEMI Standards (purchase separately) SEMI F15 Test Method for Enclosures Using Sulfur Hexafluoride Tracer Gas and Gas
