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SEMI MF723-0706 (technical revision)
SEMI D74-0116 (first published)
The second part (§ 9) specifies the presentation (i
Since the standards will have to cover a wide range of production equipment
this Standard provides:
P04500 - SEMI P45 - マスク装置向けジョブデック・データフォーマットの仕様 Revision:SEMI P45-0708 - Superseded SEMI MF723-0706 (technical revision)global Micropatterning Committee2008513global Audits and Reviews Subcommittee20086www. semi. org20087CD ROM20063 MALY Referenced SEMI Standards SEMI P39 OASISTM Open Artwork System Interchange Standard SEMI P44 Specification for Open Artwork System Interchange Standard (OASISTM) Specific to Mask Tools
