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SEMI E28-92 (Reapproved 0710)
SEMI F72-0309 (technical revision)
previously published November 2010
flat panel display (FPD)画質検査におけるムラの目視検査に近いテスト条件に対する，SEMI D31で導出された方式の適用方法を定義する。
originally published in 1983
E00100 - SEMI E1 - Specification for Open Plastic and Metal Wafer Carriers StdPbc-0413 SEMI E28-92 (Reapproved 0710)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification provides the dimensional requirements for plastic and metal wafer carriers used for the processing and handling of 3 in., 100 mm, 125 mm, and 150 mm diameter wafers. It also includes some related
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