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F02600 - SEMI F26 - グレード10/0.2 有毒特殊ガスの粒子に関する仕様 Revision:SEMI F26-0697 (Reapproved 0712) - Superseded SEMI G89-0211 (Reapproved 0318)

SKU: 52368093574
4.2

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Description

SEMI G89-0211 (Reapproved 0318)

This Standard stipulates materials relating to transport of 300 mm wafers using shipping boxes (FOSB) regulated by SEMI M31

and p- isomers) 99

and to carry out quality inspection for incoming and outgoing CCFLs

SEMI E5-1102 (technical revision)

F02600 - SEMI F26 - グレード10/0.2 有毒特殊ガスの粒子に関する仕様 Revision:SEMI F26-0697 (Reapproved 0712) - Superseded SEMI G89-0211 (Reapproved 0318)global Gases Technical Committee2012618global Audits and Reviews Subcommittee20127www. semiviews. org www. semi. org1997620033 10 0. 2 8 105 Pa 88 105 Pa 8 NH3 AsH3 PH3 Referenced SEMI Standards None.

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