C00327 - SEMI C3.27 - 三フッ化ホウ素（BF3），シリンダ充填， 99.0%品質の仕様 StdTpc-Statistical Control Characteristic parameters of these defects

Characteristic parameters of these defects are part of wafer specifications (SEMI PV22)

This Specification is appended with related information to provide application examples

Fab data include region

合成石英（SFS）

• the statistical evaluation of the particulate contamination measurement results from the analytical equipment

C00327 - SEMI C3.27 - 三フッ化ホウ素（BF3），シリンダ充填， 99.0%品質の仕様 StdTpc-Statistical Control Characteristic parameters of these defectsglobal Gases Technical Committee2011912global Audits and Reviews Subcommittee201110www. semiviews. org www. semi. org1984200211 : (Si2H6) Referenced SEMI Standards SEMI C1 Specifications for Reagents SEMI C3 Specifications for Gases