M04700 - SEMI M47 - Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI Applications Revision:SEMI M47-0707 (Withdrawn 1110) - Withdrawn SEMI C14-95 (Reapproved 1102)

SEMI C14-95 (Reapproved 1102)

regulators

6 100mm鏡面研磨単結晶シリコンウェーハ（セカンダリフラットあり，625m m 厚）

procedures for preparing and calibrating resistivity reference wafers

This Standard was technically approved by the global Automated Test Equipment Technical Committee

M04700 - SEMI M47 - Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI Applications Revision:SEMI M47-0707 (Withdrawn 1110) - Withdrawn SEMI C14-95 (Reapproved 1102)This standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 25, 2007. Initially available at www. semi. org in October 2010. Originally published November 2001; previously published July 2007. NOTICE: This document was balloted and approved for withdrawal in 2010. This specification defines thin layer silicon on insulator (SOI) wafer