E06300 - SEMI E63 - 300 mmボックスオープナ／ローダーと装置間のスタンダード（BOLTS-M）インタフェースの機械的仕様 StdVol-Facilities It expands the GEM standard

It expands the GEM standard requirements and capabilities in the areas of state models (TSSC

This edition was approved for publication by the global Audits and Reviews Subcommittee on July 1

5  The Standard includes practical methodologies of flux

SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications

1 — Specification for XML Messaging for Process Control System (PCS)

E06300 - SEMI E63 - 300 mmボックスオープナ／ローダーと装置間のスタンダード（BOLTS-M）インタフェースの機械的仕様 StdVol-Facilities It expands the GEM standardglobal Physical Interfaces & Carriers Committee2010827global Audits and Reviews Subcommittee201010 www. semi. org1997200411 300 mm1SEMI E15. 1SEMI E47. 1, SEMI E62SEMI E1. 91325 Referenced SEMI Standards SEMI E1. 9 Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers SEMI E15 Specification for Tool Load Port SEMI E15. 1 Specification for 300 mm Tool Load Port SEMI E19 Standard Mechanical Interface (SMIF) SEMI E47. 1