E07400 - SEMI E74 - Specification for Vacuum Pump Interfaces - Turbomolecular Pumps StdTpc-Equipment Models 身元の確認および資格認定のため，従業員とシステムセキュリティの関係を管理する。

身元の確認および資格認定のため，従業員とシステムセキュリティの関係を管理する。

equipment for different substrate sizes will become simpler

originally published February 2008

41 — Standard for Oxygen (O2)

stacking faults

E07400 - SEMI E74 - Specification for Vacuum Pump Interfaces - Turbomolecular Pumps StdTpc-Equipment Models 身元の確認および資格認定のため，従業員とシステムセキュリティの関係を管理する。NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard specifies the physical and electrical interfaces for turbomolecular pump (TMP) type vacuum pumps. Standardization of pump interfaces will allow for interchangeability of pumps. Device manufacturers use this