P04600 - SEMI P46 - Specification for Critical Dimension (CD) Measurement Information Data on Photomask by XML Revision:SEMI P46-0706 - Superseded SEMI G52-90 (Reapproved 1104)

SEMI G52-90 (Reapproved 1104)

the behavior of the equipment in relation to interactive exception handling

Acceptable equipment

-        Handling and processing shipping cartons of cells/modules in a fab

• To provide data quality reporting compliance methods

P04600 - SEMI P46 - Specification for Critical Dimension (CD) Measurement Information Data on Photomask by XML Revision:SEMI P46-0706 - Superseded SEMI G52-90 (Reapproved 1104)This Standard was technically approved by the Micropatterning Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www. semiviews. org and www. semi. org in November 2011; originally published July 2006. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards