S00600 - SEMI S6 - Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment Revision:SEMI S6-0707E - Superseded Data Value Types

Data Value Types

SEMI S2 — Environmental

(1 atoms/cm3 × 1020 atoms/cm3) for boron

These parameters provide meaningful information about the quality of the wafer thinning process (if used)

Data Matrix symbology is applicable to a broad range of lead-frame materials including copper and Alloy 42 in both bare and plated conditions

S00600 - SEMI S6 - Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment Revision:SEMI S6-0707E - Superseded Data Value TypesThis Standard was technically approved by the Environmental, Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017 and February 1, 2018. Available at www. semiviews. org and www. semi. org in June 2018; originally published in 1993; previously published June 2009. NOTICE: Conformance to the should provisions of this Safety Guideline is necessary to