MS00300 - SEMI MS3 - Terminology for MEMS Technology StdPbc-0418 1 This Standard is applicable

1  This Standard is applicable to measurement for optical properties of electronic paper displays under diffuse or directional illumination

and shipping

and C from the as-received surface

plate stock as specified in ASTM A240

and fire risk reduction

MS00300 - SEMI MS3 - Terminology for MEMS Technology StdPbc-0418 1 This Standard is applicableThis Standard was technically approved by the MEMS NEMS Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19, 2015. Available at www. semiviews. org and www. semi. org in September 2015; originally published as SEMI PR11 1105; previously published March 2007. Microelectromechanical Systems (MEMS) technology, while related in many ways to integrated circuit and device technology,