G02600 - SEMI G26 - Specification for Hermetic Slam Chip Carrier Lids StdTpc-300 mm Carriers & Physical Interfaces and Safety Guideline for Flammable

and Safety Guideline for Flammable Silicon Compounds

TD/GC-MS is useful for qualitative and quantitative analysis of trace-level organic compounds adsorbed on wafer surfaces

25 mm/182 mm ± 0

and the surface elemental compositions by electron spectroscopy for chemical analysis (ESCA)

CFJ includes the following functionalities

G02600 - SEMI G26 - Specification for Hermetic Slam Chip Carrier Lids StdTpc-300 mm Carriers & Physical Interfaces and Safety Guideline for FlammableThis specification covers the ceramic piece part commonly referred to as a lid, used in the construction of a hermetic SLAM package with a 0. 050" pad centerline. The SLAM package is covered separately in SEMI G5. Referenced SEMI Standards None.