F08700 - SEMI F87 - Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems Revision:SEMI F87-0304 - Superseded SEMI PV66-0715 (Reapproved 0221)

SEMI PV66-0715 (Reapproved 0221)

and micro-bump are developed to ensure high-yield of the middle-end process

24 Ω·cm to about 330 Ω·cm in p-type wafers)

With this document

together with test methods suitable for determining their magnitudes

F08700 - SEMI F87 - Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems Revision:SEMI F87-0304 - Superseded SEMI PV66-0715 (Reapproved 0221)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 This Standard establishes the properties and physical dimensions of two port components for 1. 125 inch type surface mount gas distribution system. 2 Scope 2. 1 This Standard includes common requirements,