MF039900 - SEMI MF399 - Test Method for Thickness of Heteroepitaxial or Polysilicon Layers Revision:SEMI MF399-00a (Withdrawn 0710) - Withdrawn - Historical 또한 데이터 수집 계획이 어떠한

또한 데이터 수집 계획이 어떠한 형태를 가지는지

equipment subsystem suppliers

SEMI T20-1108 (first published)

previously published July 2003

このガイドの目的は，マスフローコントローラ(MFCs)漏洩率の記述および測定のための統一された世界的にも通用する方法を確立することである。ガス受渡しシステムの漏洩を完全になくすことは，製品の質および性能を維持するうえで重要なことである。このガイドは，製造者およびユーザの間の混乱と誤解を防止するように考えられている。特に機械的な原因による漏洩率と拡散による漏洩率とを区別している。

MF039900 - SEMI MF399 - Test Method for Thickness of Heteroepitaxial or Polysilicon Layers Revision:SEMI MF399-00a (Withdrawn 0710) - Withdrawn - Historical 또한 데이터 수집 계획이 어떠한This standard was originally published by ASTM International as ASTM F399 74T. It was formally approved by ASTM balloting procedures and adhered to ASTM patent requirements. Though ownership of this standard has been transferred to SEMI, it has not been formally approved by SEMI balloting procedures and does not adhere to either SEMI Regulations dealing with patents, or SEMI Style Manual. Available at www. semi. org in June 2010. Originally published