F12200 - SEMI F122 - Guide for Facilities Data Package for Manufacturing Equipment Installation and Building Information Modeling StdTpc-Mass Flow Controllers 4 These test methods are

4  These test methods are particularly useful in testing materials to be used in photovoltaic cells and other optical device applications since the diffusion length is derived by methods that are closely related to the functioning of the device

including activities related to semiconductor or FPD manufacturing

E本スタンダードは2006年5月に編集上の修正がなされた。修正箇所は，¶10

SEMI E77-1104 (Reapproved 0815)

Chemical precursors for ALD applications

F12200 - SEMI F122 - Guide for Facilities Data Package for Manufacturing Equipment Installation and Building Information Modeling StdTpc-Mass Flow Controllers 4 These test methods are1 Purpose 1. 1 This Guide suggests formats for the facilities data package (FDP) typically required for the installation of manufacturing equipment in a facility. The data and formats suggested by this Guide complement other SEMI Standards (e. g., SEMI E6), and include the utility requirements and connections information needed for installing manufacturing equipment (including support equipment) and connecting that equipment to the facility and